Epi Structure Customizing Support
Layer(Structure) | Discription | Thickness | Remark |
---|---|---|---|
Substrate | (111) Si Substrate | ||
Substrate Diametter |
200mm (8inch) 150mm (6inch) |
725 ~ 1150 μm | 8" Notch, 6" Flat Zone |
Buffer | Higvoltage: 200 ~ 650V | 2 ~ 5.5μm | CustomizingAvailable |
Channel | GaN | 150 ~ 250 nm | Customizing Available |
Spacer | AlN | ~ 1nm | Customizing Available |
Barrier | AlGaN (18~30% Al) | 12 ~ 25 nm | Customizing Available |
Cap | p-GaN / GaN, Insitu-SiN | p-GaN Cap : 80 ~ 100 nm for e-mode SiN / GaN Cap : 1~3nm ford-mode |
Customizing Available |
Layer(Structure) | Discription | Thickness | Remark |
---|---|---|---|
Substrate | (111) Si Substrate | ||
Substrate Diametter |
200mm (8inch) 150mm (6inch) |
725 ~ 1000 μm | 8" Notch 6" Flat Zone |
Buffer | Fe-FreeBuffer | 1 ~ 3μm | CustomizingAvailable |
Channel | GaN | 150 ~ 250 nm | Customizing Available |
Barrier | AlGaN / SiN or AlGaN/GaN for sub 6GHz AlN/SiN, InAlN for mmW Bands |
12 ~ 25 nm | Customizing Available |
Cap | GaN,Insitu-SiN | SiN /GaN Cap : 1~3nm | CustomizingAvailable |
Layer(Structure) | Discription | Thickness | Remark |
---|---|---|---|
Substrate Diametter |
150.0mm (6inch) 100.0mm (4inch) |
500 μm ± 25μm | Flat Orientation |
Buffer1 | AlN | 40 ~100nm | |
Buffer 2 | Iron (Fe) Doping | 1.65 ± 0.1μm | C Doping & Customizing Available |
Channel | GaN | 150nm | CustomizingAvailable |
Spacer | AlN | ~ 1nm | Customizing Available |
Barrier | AlGaN (20~30% Al) | 16 ~ 25 nm | Customizing Available |
Cap | GaN / Insitu-SiN | 2 ~ 5 nm | Max : 5 nm |
Layer(Structure) | Discription | Thickness | Remark |
---|---|---|---|
Substrate Diametter | 150mm (6inch) / 100.0mm (4inch) | 500 μm ± 25μm | Flat |
Buffer 1 | AlN | 20 ~ 60nm | |
Channel | GaN | 300 ~ 600nm | Customizing Available |
Spacer | AlN | ~ 1nm | Customizing Available |
Barrier | AlGaN (20~30% Al) | 16 ~ 25 nm | Customizing Available |
Cap | GaN / Insitu-SiN | 2 ~ 5 nm | Max : 5 nm |
Epi Service (with advanced substrate : GaN, Diamond, etc) available
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